Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups

摘要

A new chemically amplified polymeric imaging system based on polymers containingt-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. The materials exhibit very high sensitivity when exposed to deep-UV light but their application as resists for microlithography is limited by their relatively low glass transition temperature.