Tunable Stoichiometry of BCxNy Thin Films Through Multitarget Pulsed Laser Deposition Monitored via In Situ Ellipsometry (Postprint).

著录项

• 作者

  Jones, J. G.; Sun, L.; Murphy, N. R.; Back, T. C.; Lange, M. A.; Remmert, J. L.; Murray, P. T.; Jakubiak, R.;

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• 作者单位

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• 年度 2014
• 页码 1-16
• 总页数 16
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  DEPOSITION; ELLIPSOMETERS; PULSED LASERS; SPECTROSCOPY; STOICHIOMETRY; THICKNESS; THIN FILMS; ELLIPSOMETRY; PULSED LASER DEPOSITION; TUNABLE STOICHIOMETRY; MULTITARGET; PE62102F; WUAFRL4347X03Z;

  机译：沉积; ELLIpsOmETERs;脉冲激光;光谱;化学计量;厚度;薄膜; ELLIpsOmETRY;脉冲激光沉积; TUNaBLE sTOICHIOmETRY; mULTITaRGET; pE62102F; WUaFRL4347X03Z;