Topology Optimization for the Design of 3-D Microelectromechanical Systems (MEMS) Undergoing Coupled Multiphysics Phenomena

摘要

We developed, implemented, and validated new topology optimization strategies/algorithms for the design of microelectromechanical systems (MEMS) exhibiting coupled multiphysics behavior. The numerical tools include a fully coupled nonlinear electro-thermo-mechanical and electrostatic-mechanical finite element solvers, and novel sensitivity analysis modules that allow the evaluation of the gradients of the coupled response with respect to a large number of optimization variables. These tools have been integrated into the overall topology optimization design environment.