在压阻式硅微二维加速度计的基础上,提出了一种MEMS硅微三维加速度计.该加速度计微结构包括由四梁-柱体组成的二维水平检测单元和双T型垂直检测单元两部分,通过双T型检测单元和微型柱体与四梁检测单元检测空间三维方向的加速度值.建立了该结构的数学模型并用有限元分析软件Ansys对敏感弹性元件进行力学特性分析.最后对加工出的加速度计进行性能测试.测试结果表明,该加速度计3个方向频响曲线平坦、灵敏度高、线性度好,轴间耦合度小,X向灵敏度为2.17 mV/g,非线性度为0.63％,y向灵敏度为2.08 mv/g,非线性度为0.75％,Z向灵敏度为1.66mV/g,非线性度为1.13％.%A MEMS three-dimensional? accelerometer was proposed based on the silicon-based piezoresistive two-dimensional accelerometer. The sensor consists of four beams-column level detection units and double T-shaped vertical detection unit. By the two part detection,this sensor can measure the acceleration in three-direction. The calibration method and finite element method for the accelerometer was proposed. Finally,the experimental results were presented. The experimental results show that frequency response curve of the accelerometer is flat and both the three direction of the accelerpmeter have high sensitivity,good linearity,and small shaft coupling degree. The sensitivity of the X direction is 2.17 mV/g,Y is 2.08 mV/g and Z is 1.66 mV/g,the nonlinearity of X direction is 0.63% , Y is 0.75% and Z is 1.13%.
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