Development of a Micro- and Nano-Fabrication Facility

摘要

The purpose of this project was to develop the first multiuser micro and nanofabrication facility at The City College of New York (CCNY). Four pieces of equipment were acquired under this award: (i) Spin Coating System from Laurell Technologies; (ii) Ozone Stripper from Samco; (iii) Reactive Ion Etcher from Samco; and (iv) Evaporator/Sputtering system from Denton Vacuum. In addition, our school provided additional matching funds that enabled this research group to also purchase a Deep-UV Exposure System from Optical Analysis Instruments. This facility has fostered several research grant awards and applications from the PIs, has encouraged the development of undergraduate and graduate courses involving micro and nanotechnology at CCNY, and has enabled the PIs to mentor a total of 15 undergraduate and 11 graduate researchers via projects that utilize the facility.