Transfer of Fabrication of Universal MEMS Integrated Dual-Spring (UMIDS) Process to a Distributed Fabrication Network; Final technical rept. Nov 2005-Sep 2007

摘要

Spawar has been developing a process sequence called the 'Universal MEMS Integrated Dual-Spring'(UMlDS) for several years. This process has shown promise for the fabrication of extremely sensitive inertial sensor devices. Under this effort, Spawar researchers were tasked with the transfer of the UMIDS process to the DARPA-established MEMS Exchange program at the Corporation for National Research Initiatives (CNRI) in Reston Virginia. Specifically, Spawar provided to the MEMS Exchange the process sequence, device designs, and various process details and parameters to provide a starting point to allow the MEMS Exchange to fabricate accelerators using the UMIDS process. This final report outlines our efforts and the results of the fabrication of the accelerator devices made using the Spawar UMIDS process. The UMIDS process was successfully transferred to the MEMS Exchange.