Collaborative Research and Development (CR&D). Delivery Order 0051: Atomic Scale Transmission Electron Microscope Image Modeling and Application to Semiconductor Heterointerface Characterization

摘要

This research in support of the Air Force Research Laboratory Materials and Manufacturing Directorate was conducted from 19 May 2006 through 31 January 2008. This task developed and used computer models of electron beam transmission through complex semiconductor heterostructures to determine the interface compositions in real images, and to study how growth and/or processing conditions affect the layers and interfaces. The techniques and models developed, as well as the results of applications of these models to AFRL/MLPS-provided semiconductor samples are reported.