RESEARCH AND DEVELOPMENT FOR SURFACE PROTECTION OF SEMICONDUCTOR DEVICES

摘要

Effort was concentrated in analyzing, understanding and controlling phenomena at or near semiconductor surfaces so that the level of device technology would be raised.nA controlled ambient program, controlling the atmosphere in the package above the semiconductor surface, stabilized and also optimized the electrical parameters of the devices. This was accomplished by controlling the concentration and distribution of water molecules at the surface in the vicinity of the junction.