Investigation of Plasma Generators for Microwave Devices

摘要

An experimental study on the Penning Ionization Gauge (PIG) discharge and ion emission from beta-eucryptite was conducted with a view toward the production of plasmas suitable for microwave application. Langmuir probe measurements on the PIG were obtained under various conditions of anode current, magnetic field, gas pressure, and probe position. Radial and longitudinal profiles of electron density, electron temperature, and plasma potential were obtained. Plasma synthesis resulting from separate emitters of electrons and lithium ions from beta-eucryptite was studied. A plasma generator utilizing this concept was designed and fabricated. (Author)