PREPARATION AND FABRICATION OF CRYSTALLINE MATERIALS FOR USE AS SURFACE ACOUSTIC WAVE DEVICES

摘要

The work performed under this contract was concerned with the development of techniques for the preparation and fabrication of surface wave plates for ultimate use as devices. Particular emphasis was on the definition of crystallographic orientation, the preparation of damage-free surfaces for low loss devices and the actual fabrication of special geometries for use as surface wave circuit components. Three kinds of crystalline materials were processed under this investigation: Bismuth Germanium Oxide, Lithium Tantalate and Lithium Niobate, each having its own characteristic.