Application and Deterioration of Thin Films Used for Microelectronic Devices

摘要

Microelectronic technology makes use of the knowledge and characterization methods of thin films and of our understanding of interfaces between thin films or between films and substrates. (See in this context some of the other papers in this book). The present contribution deals accordingly with thin films which are utilized in microelectronic devices. It needs to be realized that computers and other related devices depend heavily on metallic or semiconducting layers which often have only the size of one-tenth of the thickness of a human hair. As the electronic devices shrink, these layers represent an ever greater fraction of the total device volume. These very films actually determine the electrical characteristics and also the stability (reliability) of the devices.(Reprints).