首页> 外文期刊>Thin Solid Films >Development of high dielectric dual phase [Bi4Ti3O12](X)-[CaCu3Ti4O12](1) (-) (X) nanocomposite thin films for modern microelectronic device applications
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Development of high dielectric dual phase [Bi4Ti3O12](X)-[CaCu3Ti4O12](1) (-) (X) nanocomposite thin films for modern microelectronic device applications

机译:高介电双相[Bi4Ti3O12](X)-[CaCu3Ti4O12](1)(-)(X)纳米复合薄膜的开发,用于现代微电子器件应用

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A dual phase system with different compositions (X = 0, 0.2, 0.4, 0.6, 0.8,1.0) of (Bi4Ti3O12)(x)-(CaCu3Ti4O12)(1) (-) (x) [(BTO)(x)-(CCTO)(1) (-) (x)] thin films have been grown on a platinized silicon substrate using the spin-coating technique. The X-ray diffraction (XRD), Field Emission Scanning Electron Microscopy (FE-SEM), and Raman results show that the two different crystal phases, orthorhombic BTO and cubic CCTO exist together within the thin film matrices. The effect of BTO phase concentration on the dielectric and the P-E hysteresis behavior of the composites was investigated. In an unexpected observation, the incorporation of CCTO into BTO is found to enhance the dielectric constant of the nanocomposite, in accordance with the percolation theory. The ferroelectric hysteresis (P-E) loops were altered with relating to stoichiometry compositions. Near the percolation threshold for 20 mol% BTO with 80 mol% CCTO in composite, high dielectric constant (similar to 6378), and high coercivity (similar to 162 kV/cm) is obtained compared to the single phase BTO and CCTO. These results show that the (Bi4Ti3O12)(0.2)-(CaCu3Ti4O12)(0.8) is a good candidate for the miniaturization of modem microelectronic devices. (C) 2017 Published by Elsevier B.V.
机译:具有(Bi4Ti3O12)(x)-(CaCu3Ti4O12)(1)(-)(x)[(BTO)(x)-(X = 0、0.2、0.4、0.6、0.8、1.0)的不同组成的双相系统(CCTO)(1)(-)(x)]薄膜已使用旋涂技术在镀铂硅基板上生长。 X射线衍射(XRD),场发射扫描电子显微镜(FE-SEM)和拉曼分析结果表明,正交晶体BTO和立方CCTO这两种不同的晶相同时存在于薄膜基质中。研究了BTO相浓度对复合材料介电性能和P-E磁滞行为的影响。在意外的观察中,根据渗滤理论,发现将CCTO掺入BTO可以增强纳米复合材料的介电常数。铁电磁滞(P-E)回路与化学计量组成有关而改变。与单相BTO和CCTO相比,在复合物中20 mol%BTO和80 mol%CCTO的渗透阈值附近,可以获得高介电常数(类似于6378)和高矫顽力(类似于162 kV / cm)。这些结果表明,(Bi4Ti3O12)(0.2)-(CaCu3Ti4O12)(0.8)是现代微电子器件小型化的良好候选者。 (C)2017由Elsevier B.V.发布

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