Diamond Deposition and Defect Chemistry Studied via Solid State NMR.

摘要

Diamond defects were quantified by nuclear magnetic resonance (NMR). While maintaining the macroscopic integrity of the films, concentrations between 0.001 and 1.0 at.% H were measured, among the lowest ever reported by solid-state 1H NMR. These concentrations were correlated to infrared absorption in the 8 to 10 micron region and to thermal conductivity. Despite the low concentrations. Multiple Quantum NMR reveals a high degree of hydrogen clustering consistent with grain boundary passivation. Most hydrogen is rigidly held, but some, probably in -OCH3 and -NCH3 defects, undergoes rotation at room temperature. Similar results were obtained for hot-filament, microwave-plasma and DC arc-jet films, suggesting a common surface chemistry, but no hydrogen was detected in an as-deposited combustion film. 13C NMR provided the first quantitative determination of non-diamond bonded carbon defects, providing a benchmark for Raman spectroscopy, the primary characterization method for diamond. Selective 13C labeling demonstrated heterogeneous reactions involving carbon occur at the hot-filament. With high-speed magic-angle-spinning 19F NMR, CFx (x=1-3) functionalities were resolved on the surface of plasma-treated diamond powder. Understanding these defects impacts the understanding of film growth mechanisms and structure-property relationships for CVD diamond. Diamond, NMR, CVD, Defects, Thin films, Isotopic substitution.