Analysis of the Ferroelectric Thin Films Deposited by Pulsed Laser Deposition onOxide and Fluoride Substrates

摘要

This work has been carried out as part of an ongoing investigation in which thinfilm ferroelectric phase shifters are being constructed, tested, and optimized. These phase shifters will be incorporated into multi-element phased array antennas where the beam steering material used was Ba(0.6)Sr(0.4)TiO3 (BSTO) and BSTO with 1 wt.% oxide additive. Thin films of BSTO have been deposited by pulsed laser deposition (PLD) onto various oxide and fluoride substrates. These include oxide substrates such as magnesium oxide (MgO), sapphire (Al2O3), lanthanum aluminate (LaAlO3), neodymium gallate (NdGaO3), and fluoride substrates such as rubidium manganese fluoride (RbMnF3). (jg).