Surface Contour Measurement Using Optical Scanner

摘要

The use of aspheric and unconventional optical components has rapidly increased over the past few vears But the fabrication technics of such components is limited by lack of suitable method for assessment of surface shape of large aspheric optical components, especially for large convex surfacenIn this paper we discuss a 3-D pencil beam profiler which is suitable for measuring optical aspheric surface. having different parameters and large radius with interferometric accuracy without the need of standard surface and null lens. The principle of the profiler is based on pencil beam optical scannernThe tested workpiece is put on a turnable table with a standard plane plate which is used to give the information of the tilt of the turnable table when table is rotated for 3-D contour measurement The information will be applied for removing the error introduced during the table turning from the final map of the surface