Sensors for In-Situ and In-Process Measurements in Microelectronics Manufacturing

摘要

This final report summarizes the progress we have made in developing ultrasonicsensors for in-situ monitoring of IC manufacturing processes. The work was done in collaboration with SRC funding. We report a temperature measurement technique based on the temperature dependence of acoustic wave velocity in silicon wafers. The zeroth order antisymmetric Lamb wave is excited in the wafer using the quartz pins which support the wafer during processing. Extensional waves are generated in the quartz pin by a PZT-5H transducer and the acoustic energy is coupled to the Lamb wave at the contact between the sharpened end of the pin and the wafer surface. The detection is done by a similarly modified quartz pin or pins. By measuring the time of flight of the Lamb wave in the wafer between the two pins,