Microelectronic sensor device and method of manufacturing a microelectronic sensor device

摘要

The invention provides a microelectronic sensor device and a corresponding method for producing the microelectronic sensor device. The microelectronic sensor device comprises a number of optical ring resonators and an optical waveguide for coupling and decoupling electromagnetic radiation, wherein the optical waveguide is arranged with respect to the number of optical ring resonators such that a temperature-dependent resonance wavelength shift in the number of optical ring resonators by means of the optical waveguide is measurable.