Modeling and simulating of V-shaped piezoelectric micro-cantilevers using MCS theory considering the various surface geometries

摘要

Atomic force microscopy (AFM) is widely used as a tool in studying surfaces and mechanical properties of materials at nanoscale. This paper deals with mechanical and vibration analysis of AFM vibration in the non-contact and tapping modes for V-shaped piezoelectric micro-cantilever (MC) with geometric discontinuities and cross section variation in the air ambient. In the vibration analysis, Euler-Bernoulli beam theory based on modified couple stress (MCS) theory has been used. The governing equation of motion has been derived by using Hamilton's principle. By adopting finite element method (FEM), the MC differential equation has been solved. Damping matrix was considered in the modal space. Frequency response was obtained by using Laplace transform, and it has been compared with experimental results. Newmark algorithm has been used based on constant average acceleration to analyze time response of MC, and then time response results in the vibration mode, far from the sample surface have been compared with experimental data. In vicinity of sample surface, MC is influenced by various nonlinear forces between the probe tip and sample surface, including van der Waals, contact, and capillary forces. Time response was examined at different distances between MC base and sample surface, and the best distance was selected for topography. Topography results of different types of roughness showed that piezoelectric MC has been improved in the air ambient. Topography showed more accurate forms of roughness, when MC passes through sample surface at higher frequencies. The surface topography investigation for tapping and non contact modes showed that using of these two modes are suitable for topography. (C) 2016 Elsevier B.V. All rights reserved.