METHOD FOR SIMULATING SURFACE ACOUSTIC WAVE ON MODELED STRUCTURE, COMPUTER READABLE MEDIUM HAVING PROGRAM INSTRUCTION FOR SIMULATING SURFACE ACOUSTIC WAVE ON MODELED STRUCTURE, AND COMPUTER SYSTEM FOR SIMULATING SURFACE ACOUSTIG WAVE ON WAVEFORM MODEL

摘要

PPROBLEM TO BE SOLVED: To provide a method and system for simulating a surface acoustic wave on a structured model. PSOLUTION: The method of simulating the surface acoustic wave (SAW) on a structure that is modeled on a computer or other processor-based device enables the testing of actual SAW devices or to develop improved SAW devices. In this method, the modeled structure is preferably that of a corrugated structure that includes an electrode disposed on top of a piezoelectric substrate. A meshfree method then is applied to the modeled using Newton's equation of motion and Gauss's equation of charge conservation as governing equations. Subsequently, a set of equations is solved simultaneously to obtain numerical results. PCOPYRIGHT: (C)2006,JPO&NCIPI