EFFECT OF THE C2H2 AND N-2 FLOW RATE ON NANOCOMPOSITE nc-ZrCN/a-C:H(N) FILM SYNTHESIZED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE

摘要

Nanocomposite nc-ZrCN/a-C:H(N) films were prepared by filtered cathodic vacuum arc technique using the C2H2 and N-2 gas as the precursor. The effect of the C2H2 and N-2 flow rate on the microstructure, internal stress, phase composition, and mechanical properties of nanocomposite nc-ZrCN/a-C:H(N) films has been investigated by glancing incidence X-ray diffraction (GIXRD), surface profiler, and X-ray photoelectron spectroscopy(XPS). It was revealed that the C2H2 and N-2 flow rate affected the structure, Zr content, and internal stress of the films significantly. Furthermore, XRD pattern indicated the presence of the ZrCN crystalline grains in the range of 3-10 nm, and the deconvolution results for XPS spectra showed that the film mainly was constituted by Zr-C, C=C(sp2) and C-C(sp3) bonds.