Superhard Nanocomposite Nc-tic/a-c:h Film Fabricated By Filtered Cathodic Vacuum Arc Technique

摘要

Superhard nanocomposite nc-TiC/a-C:H films, with an excellent combination of high elastic recovery, low friction coefficient and good HIE ratio, were prepared by filtered cathodic vacuum arc technique using the C_2H_4 gas as the precursor. The effect of C_2H_4 flow rate on the microstructure, phase composition, mechanical and tribological properties of nanocomposite nc-TiC/a-C:H films have been investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), energy disperse spectroscopy (EDS), microindentation and tribotester measurements. It was observed that the C_2H_4 flow rate significantly affected the Ti content and hardness of films. Furthermore, by selecting the proper value for C_2H_4 flow rate, 20 seem, one can deposit the nanocomposite film nc-TiC/a-C:H with excellent properties such as superhardness (66.4 GPa), high elastic recovery (83.3%) and high HIE ratio (0.13).