Directed self-assembly with sub-100 degrees celsius processing temperature, sub-10 nanometer resolution, and sub-1 minute assembly time

摘要

The synergetic combination of low-temperature thermal assistance with solvent annealing for the self-assembly of block copolymers with a large Flory-Huggins interaction parameter simultaneously achieves sub-10 nm resolution and sub-1 minute annealing time. It is shown that this method is applicable to different geometries of patterns such as nanoscale dots, lines, and holes.