Nanotransfer Printing with sub-10 nm Resolution Realized using Directed Self-Assembly

摘要

Soft lithography techniques using elastomeric molds have attracted significant interest from researchers during the past two decades. Various examples have been presented including microcontact printing, replica molding, solvent-assisted micromolding, capillary force lithography, micro/ nanotransfer molding, micromolding in capillaries, and decal transfer lithography. The advantages of these techniques include simplicity, versatility, moderate resolution, low cost, and high throughput, which provide opportunities to readily fabricate various devices such as transistors, sensors, microfluidic devices, and so on.