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Resistive-switching crossbar memory based on Ni-NiO core-shell nanowires

机译:基于Ni-NiO核壳纳米线的电阻开关交叉开关存储器

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Resistive-switching memory (RRAM) is an emerging nanoscale device based on the localized metal-insulator transition within a few-nanometer-sized metal oxide region. RRAM is one of the most promising memory technologies for the ultimate downscaling of nonvolatile memory. However, to develop memory arrays with densities approaching 1 Tb cm-2, bottom-up schemes based on synthesis and assembly of metal oxide nanowires (NWs) must be demonstrated. A RRAM memory device based on core-shell Ni-NiO NWs is presented, in which the Ni core plays the role of the metallic interconnect, while the NiO shell serves as the active switching layer. A resistance change of at least two orders of magnitude is shown on electrical operation of the device, and the metal-insulator switching is unequivocally demonstrated to take place in the NiO shell at the crossing between two NWs or between a NW and a gold electrode strip. Since the fabrication of the NW crossbar device is not limited by lithography, this approach may provide a basis for high-density, low-cost crossbar memory with long-term storage stability. Self-assembled crossbar junctions featuring resistive switching are developed from core-shell nanowires. Ni nanowires (NWs) are first grown by electroplating in a template. The nanowires are then thermally oxidized to obtain the core-shell Ni-NiO structure, and crossbar junctions are developed by magnetic alignment and electron-beam lithography of the electrical contacts. Nonvolatile resistance switching with a resistance window of more than five decades is shown, which is evidence for metal-insulator transition at the cross-point junction between the two core-shell NWs.
机译:电阻开关存储器(RRAM)是一种新兴的纳米级器件,它基于在几纳米大小的金属氧化物区域内的局部金属-绝缘体过渡。对于非易失性存储器的最终缩减,RRAM是最有前途的存储器技术之一。但是,要开发密度接近1 Tb cm-2的存储阵列,必须证明基于金属氧化物纳米线(NWs)的合成和组装的自底向上方案。提出了一种基于核-壳Ni-NiO NWs的RRAM存储器件,其中Ni核起金属互连的作用,而NiO壳充当有源开关层。在设备的电气操作中显示出至少两个数量级的电阻变化,并且明确地证明了在NiO外壳中两个NW之间或NW与金电极条之间的交叉处发生了金属绝缘体切换。由于NW交叉开关设备的制造不受光刻限制,因此该方法可为具有长期存储稳定性的高密度,低成本交叉开关存储器提供基础。具有电阻切换功能的自组装交叉开关结是从核-壳纳米线开发的。 Ni纳米线(NWs)首先通过电镀在模板中生长。然后将纳米线热氧化以获得核-壳Ni-NiO结构,并通过电接触的磁对准和电子束光刻技术开发出交叉开关。示出了具有超过五十年的电阻窗口的非易失性电阻开关,这是在两个核壳NW之间的交叉点结处金属-绝缘体过渡的证据。

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