Improved linear ultrasonic motor performance with square-wave based driving-tip trajectory

摘要

This paper proposes the application of a non-sinusoidal periodic excitation voltage to induce a near-square-wave driving tip trajectory in linear ultrasonic motors (LUSMs). A square-wave-based trajectory can deliver superior frictional force to the moving stage in the forward stroke of the driving tip motion and reduced frictional force during the return stroke. This would reduce lost power in the periodic driving tip motion, thereby, increasing the output force and power of the LUSM. An implementation procedure is suggested to achieve the near-square-wave driving tip trajectory. The proposed approach is illustrated through realistic finite-element-based simulations using a bimodal LUSM configuration.