Large Area Sputtered Al_2O_3 Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi~2

Andreas Kloeppel; Jian Liu; Evelyn Scheer

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Large Area Sputtered Al_2O_3 Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi~2

机译：PVD阵列系统PiVot 55kVi〜2上用于高迁移率AM-TFT背板的大面积溅射Al_2O_3膜

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The production worthiness of sputtered Al_2O_3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot is demonstrated in order to provide increased stability to IGZO AM-OLED backplanes. The achieved Al_2O_3 layer properties and uniformity illustrate the advantages of using rotary technology.

机译：为了在IGZO AM-OLED背板上提供更高的稳定性，证明了在PVD阵列系统PiVot上使用旋转靶在Gen 8.5衬底上溅射Al_2O_3势垒膜的生产价值。所获得的Al_2O_3层特性和均匀性说明了使用旋转技术的优势。

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《SID International Symposium: Digest of Technology Papers》 |2013年第2期|共4页
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Andreas Kloeppel; Jian Liu; Evelyn Scheer;
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1. Large Area Sputtered Al_2O_3 Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi~2 [J] . Andreas Kloeppel, Jian Liu, Evelyn Scheer SID International Symposium: Digest of Technology Papers . 2013,第2期

机译：PVD阵列系统PiVot 55kVi〜2上用于高迁移率AM-TFT背板的大面积溅射Al_2O_3膜
2. The role of PVD sputtered PTFE and Al 2O 3 thin films in the development of damage tolerant coating systems [J] . Chi-Ho Ng, Jeff Rao, John Nicholls Journal of Materials Research and Technology . 2020,第1期

机译：PVD溅射PTFE和AL 2> 2 O 3 薄膜在开发损坏耐腐蚀系统
3. The role of PVD sputtered PTFE and Al2O3 thin films in the development of damage tolerant coating systems [J] . Progress in Artificial Intelligence . 2020,第1期

机译：PVD溅射PTFE和Al2O3薄膜在损伤耐腐蚀涂料系统中的作用
4. Large area sputtered Al_2O_3 films for high mobility AM-TFT backplanes on PVD array system PiVot 55kVi~2 [C] . Andreas Kloeppel, Jian Liu, Evelyn Scheer International display workshops . 2012

机译：PVD阵列系统PiVot 55kVi〜2上用于高迁移率AM-TFT背板的大面积溅射Al_2O_3膜
5. Mobility Optimization in LaxBa1-xSnO3 Thin Films Deposited via High Pressure Oxygen Sputtering [D] . Postiglione, William Michael. 2017

机译：通过高压氧气溅射沉积LaxBa1-xSnO3薄膜的迁移率优化
6. Investigation of the High Mobility IGZO Thin Films by Using Co-Sputtering Method [O] . Chao-Ming Hsu, Wen-Cheng Tzou, Cheng-Fu Yang, 2015

机译：共溅射法研究高迁移率IGZO薄膜
7. An Optical Backplane Demonstrator System Based on FET-SEED Smart Pixel Arrays and Diffractive Lenslet Arrays [O] . Plant, D. V., Robertson, B., Hinton, Harvard Scott, 1995

机译：基于FET-SEED智能像素阵列和衍射小透镜阵列的光学背板演示器系统
8. HIPIMS and MPP Sputtered TA Films Using I-PVD Technology. [R] . B. Abraham F. Yee M. Cipollo R. Chistyakov S. L. Lee 2009

机译：采用I-pVD技术的HIpIms和mpp溅射Ta薄膜。

Large Area Sputtered Al_2O_3 Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi~2

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