DESIGN OF A SINGLE-CRYSTAL SILICON-BASED MICROMECHANICAL RESONATOR USING FINITE ELEMENT SIMULATIONS

摘要

The present paper introduces the design of a micromachined single-crystal silicon-based resonator. The primary goal of the work is to find a structure that provides the maximum sensitivity. However, there are other important requirements such as the suppression of the higher order torsional vibrational modes, low power dissipation or low temperature dependence. These problems are studied using mainly the finite element method. The simulations take into account the effect of varying the dimensions of the resonator and deal with the viscous damping of the thin air layer above the structure. The article also gives a solution to the temperature change-related bending and stress problems. [References: 9]