L梁微梳齿谐振器的有限元分析与工艺设计

摘要

建立了L梁微机械梳齿谐振器的仿真模型,利用ANSYS有限元仿真软件对其进行模态和谐响应仿真分析.通过模态分析,得到谐振频率等重要性能参数以及不同L梁结构参数对它们的影响:谐振频率随着L长梁梁长的增加而减小；随着L长梁梁宽,L短梁梁长、梁宽的增加而增加.并在谐响应仿真分析中得到微机械谐振器的幅频响应特性,设计了谐振器的工艺流程和相应的掩膜版图.%Simulation model of the L-beam micromechanical comb resonator was established. Its modal and harmonic response were obtained by the ANSYS finite element simulation software. Through the modal analysis, key parameters including resonance frequency were obtained, and the influence of different L-beam structures on the parameters is that: the resonance frequency will decrease as the long beam's length increases, and will increase as the length and width of short beam as well as the width of the long beam increase. Besides, the amplitude-frequency response characteristics of micromechanical resonators were obtained through harmonic response simulation analysis. The fabrication process and layouts of the resonator were designed.