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Improving the stability and reproducibility of the carbon nanotube gas ionization sensor by Co-Ti/Ti co-deposited catalyst layer

机译:通过Co-Ti / Ti共沉积催化剂层提高碳纳米管气体电离传感器的稳定性和可重复性

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摘要

A novel gas ionization sensor (GIS) of the carbon nanotube (CNT) film using the Co-Ti/Ti co-deposited catalyst layer had been proposed for the first time to exhibit higher stability and better reproducibility with respect to the CNT film ones with the single catalyst layer. For the proposed CNT GIS, the variation of the breakdown voltage (V_(br)) was less than 25% for the ten devices with the same structure measurement since the lengths of the CNT synthesized were uniform and aligned. Besides, the fluctuation of the V _(br) was about 14% during 1000 operation times in nitrogen at the pressure of 0.035 Torr. It was attributed to the adhesion between CNTs and the substrate could be improved since the co-deposited catalyst layer and Ti adhesion layer would be coalesced so that the Co nanoparticles would be partially immersed into Ti layer after hydrogen pretreatment. Such a CNT GIS with the co-deposited catalyst layer also exhibited high sensitivity and selectivity for different kinds of gases detection as well as the good linearity for detecting the gas mixture.
机译:首次提出了一种使用Co-Ti / Ti共沉积催化剂层的碳纳米管(CNT)膜的新型气体电离传感器(GIS),该膜相对于CNT膜具有更高的稳定性和更好的重现性。单催化剂层。对于拟议的CNT GIS,由于合成的CNT的长度均匀且对齐,因此在具有相同结构测量的十个器件中,击穿电压(V_(br))的变化小于25%。另外,在氮气中,在0.035Torr的压力下,在1000次操作时间内,V_(br)的波动约为14%。这归因于碳纳米管与基底之间的粘附性可以得到改善,因为共沉积的催化剂层和Ti粘附层会聚结,从而在氢预处理后将Co纳米颗粒部分浸入Ti层中。具有共沉积的催化剂层的这种CNT GIS对于各种气体检测也显示出高灵敏度和选择性,以及对于检测气体混合物具有良好的线性。

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