ZnO Nanoparticles-Based Ethanol Sensor with Fast Response and Low Operating Temperature

摘要

ZnO nanoparticles are synthesized by chemical vapor deposition (CVD) method and characterized by X-ray diffraction (XRD), field-emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). The specific surface and the pore size of ZnO nanoparticles are measured by specific surface and pore size analysis instrument. The ethanol sensing properties of the gas sensor based on ZnO nanoparticles are investigated by exposing them to different concentrations of gaseous ethanol at various temperatures. At an operating temperature of 150℃, the gas sensor has good performance. The response value to 100 ppm gaseous ethanol at optimum operating temperature is 21.6, and corresponding response and recovery times are about 4 and 32 s, respectively. The results indicate that ZnO nanoparticles synthesized by CVD have potential applications for fabricating high performance and low power consumption ethanol sensors.