Hybrid integration of 1 x 12 metal-semiconductor-metal photodetector and polyimide waveguide array [Review]

摘要

We report here a demonstration of hybrid integration of a 1 x 12 metal-semiconductor-metal (MSM) photodetector array and polyimide channel waveguides via 45degrees total-internal-reflection (TIR) micro-couplers. The two-layer polyimide waveguide array was constructed using Ultradel 9120D for the core and Ultradel 9020 for the lower cladding layer. The coupling loss and propagation loss of the waveguide are 0.2 dB and 0.21 dB/cm, respectively. The cross talk of the adjacent channels is -32 dB. The MSM photodetector array was fabricated on a semi-insulated GaAs wafer. The photodetectors, are integrated to operate in the conventional vertical illumination mode. We measured the external quantum-efficiency and 3 dB bandwidth of the integrated MSM photodetectors at 0.4 A/W and 2.648 GHz, respectively. The aggregate 3 dB bandwidth of the 12-channel integrated system is 32 GHz. [References: 12]