A linear Bragg-Fresnel optics fabricated for 1D focusing of 18 nm X-ray radiation

摘要

The theoretical and technique results of a 1D focusing linear Bragg-Fresnel optics working at 18 nm X-ray radiation are given in the present paper. A theoretical method describing its optical performances is introduced briefly, the: parameters of the diffraction pattern are presented. The preparation of multilayer mirrors. the decision of X-ray absorber layer thickness and the fabrication process of the diffraction pattern are described. The studied results of thermal and chemical stabilities for Mo/Si multilayer structure are shown. Some measured results for the 1D focusing linear Bragg-Fresnel optics are given. (C) 1999 Elsevier Science Ltd. All rights reserved. [References: 4]