Simulating the Cross Section of Inelastic Scattering of Electrons in Layered Structures on the Basis of Dielectric Functions and Experimental Spectra of the Film and Substrate

摘要

This paper describes a technique of simulating the cross section of inelastic scattering of electrons in layered structures from the experimental spectra of the cross section of inelastic scattering of reflected electrons of structural components on the basis of the theoretical Yubero - Tougaard model of the cross section of inelastic scattering in a homogeneous medium and its generalization for the case of layered structures. This technique is tested by an example of studying the spectra of the cross section of inelastic scattering in a two-layer SiO_2/Si structure.