Method for producing dielectric thin film with layered perovskite structure, dielectric thin film with layered perovskite structure and electronic component having dielectric thin film with layered perovskite structure

摘要

PROBLEM TO BE SOLVED: To thermodynamically realize a layer-like structure in a non-balanced state, by stacking perovskite compound having nonstoichrometric composition on a desired substrate, and non-orderly and orderly stacking a perovskite structure layer which an oxygen octahedron shares an apex and a rock salt structure. SOLUTION: A generation device 1 splashes an exciting type and the like from a target 3 irradiating a laser beam and generates a thin film having a composition which is almost similar to the target 3 on a facing substrate for film forming 4. The target 3 is the sintered body of Ba1.2 TiO3.2 formed of A site excess, and it has a fine structure constituted of BaTiO3 particles having perovskite structure and secondary phase Ba2 TiO4 which is uniformly distributed in a grain boundary. Thus, a Bax TiO2+x dielectric thin film having the A site excess of a layer-like perovskite structure can be formed.