Synthesis and thermal properties of aminopyrimidine Ge(II) precursors for CVD/ALD technology

摘要

Derivatives of aminopyrimidine had been used as ligands in various metals complexes but not as precursors for PRAM. A series of aminopyrimidine Ge(II) precursors has been synthesized for the first time. The diamine germanium (II) precursors were tested by TG and demonstrated excellent volatilization.