Indium tin oxide nanosized composite powder prepared using waste ITO target

摘要

Indium tin oxide (TTO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, filtrated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tin hydroxide was obtained. The nanosized ITO composite powder was prepared after the precursor heat-treated at 500 deg C for 2 h. TEM images show a narrow distribution of particle size is 5-20 nm and the particle size can be controlled. Its granule has a spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O_3 phase in the ITO powder heat-treated at 500 deg C. The purity of ITO composite powder is 99.9907 percent. The content of indium within filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Appropriate amount of SnCl4-5H_2O was dissolved in the filtrate, and then ITO powder containing 10 wt. percent SnO_2 was successfully prepared by heat-treating.