A new versatile electrochemical etching chamber (VECEC) system for multi-size and multi-shape detector processing

摘要

A new versatile electrochemical etching ECE chamber (VECE) system is introduced in which the effective electrochemically etched area can have variable sizes and/or shapes required using templet etching. The flat rubber washers act as templets and holders of the etchant, and control the size and shape of the effective etched area of the detector which can be of various shapes and sizes desired. The system was operated in two operation modes A and B in which the both sides and one side of the detector were etched respectively. Detectors with etched areas having diameters from 1 to 18 cm have also been successfully etched by this system. Multi-chambers have been also designed using this principle for larger-scale multi-detector processing. The effects of etching area and time on the current through the detector have also been studied. [References: 8]