Micron-Level 3-D Surface Scanning

摘要

Employing a vertically oscillating tuning fork for accurate 3-D surface scanning within microns, this confocal displacement sensor has 64 channels. It has been jointly introduced by Metrology Resource Co. (Detroit, MI) and Siemens Optical solutions (Munich, Germany). Metrology Resource Co. will market the confocal displacement sensor in the US and Canada.