Numerical model for simulating axisymmetric rod growth in three-dimensional laser chemical vapor deposition

摘要

Laser chemical vapor deposition is an important process for free-form fabrication of microparts. A laser beam is focused through a vacuum chamber window onto a movable substrate. The laser beam induces gas in the chamber, to react at (or near) the focal spot on the substrate. As a result, solid-phase reaction products are deposited on the substrate. In this paper, we develop a numerical model for simulating axisymmetric rod growth by solving the coupled equations for heat flow and growth.