MACRO PZT MEMS BASED WIDETUNABLE COUPLED LINE RESONATOR

摘要

Resonators are core components in building advanced radio frequency circuits and systems. Tunable resonators are highly needed for adaptive/tunable microwave components including filters and low-noise power amplifiers, which are of great potential for the use in future multiband multi-carrier systems. This letter reports a wide tunable two-coupled microstrip resonator. One of the lines is replaced by a macro MEMS piezoelectric actuator. When bias is applied, the coupling between the two lines is tuned; as a consequence, the center frequency is shifted. This work also takes a close look of the actuator's mechanical resonance.