PZT unimorph based, high stroke mems deformable mirror with continuous membrane and method of making the same

摘要

A PZT unimorph actuated, continuous transferred membrane comprises a controllably deformable mirror. The actuators with a 12 μm stroke at 20V are fabricated as an array, which is designed to meet the unique needs of adaptive optics systems for vision science. What is provided is a deformable mirror with capabilities such a robust construction, low power, compact size and low weight. The actuation principle for deforming a mirror element is based on the piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the piezoelectric unimorph to deform and push on the portion of the mirror connected to it. The advantage of this approach lies in the fact that generally small strains obtainable from the piezoelectric material at modest voltages are thus translated into large displacements.