Influence of co-firing process condition on low temperature co-fired ceramics membrane deflection

摘要

Purpose-The paper aims to present the influence of the co-firing process conditions of low temperature co-fired ceramics (LTCC) on the deformation of thin LTCC membranes. Design/methodology/approach-The statistical design of the experiment methodology was used in the frame of these investigations to reduce the time and costs of the experiments and to ensure easier interpretation of the obtained results. Moreover, this conception permits the rough estimation of the membrane deflection fired at optimal process conditions. Findings-The applied design of the experiment methodology allowed the researchers to find the optimal co-firing process conditions and to estimate the membrane deflection at the optimal process conditions. The estimation fits well with the results of real measurement that was conducted to confirm the estimation precision. Research limitations/implications-The experiment was conducted for only one type of LTCC, DP951. The precision of the design of the experiment optimization and estimation of the response at optimal conditions depend on the described object. Therefore, the findings of this paper do not have to be generally true for other LTCC tapes, and if other LTCC tapes deformation should be investigated, then similar analysis shall be conducted for them. Practical implications-The deformation of LTCC membranes affects the sensitivity and repeatability of LTCC acceleration and pressure sensors. Hence, the decrease of membrane deflection increases the usability of LTCC in such applications. Originality/value-This paper presents simple optimization of co-firing process conditions of LTCC devices using statistical design of the experiment.