New design architecture of a 3-DOF vibratory gyroscope with robust drive operation mode and implementation

摘要

This paper presents new gyroscope design architecture with the complete 2-DOF drive and 1-DOF sense mode oscillators that enable the implementation of reduced drive bandwidth without significantly decreasing the sense-to-drive mass ratio of the device. The mechanical structure has an additional anchoring of the decoupling frame mass which allows for the specification of the drive mode resonances and the coupling between the masses independent of the sense mode frequency. This feature eliminates the requirement of an increased design space for realizing a high operational frequency device with robust operation. In addition to this, a reduction in the bandwidth enabled by the additional anchor, leads to the increase in drive mass amplitude, which in turn results in an increased mechanical gain. With this arrangement, the actuation voltage can be further reduced for the same drive displacement as of non-anchored structure. This device has been mathematically modelled considering decoupled frame anchoring effect, designed and then fabricated by using the economical UV-LIGA technology with nickel as a key structural layer of 8 mu m thickness; with an overall reduced key structure size of 2.13 by 1.93 mm. Experimental characterization demonstrates the two drive resonances at 8.55 and 10.6 kHz with a bandwidth of 1.0 kHz and the sense mode resonance at 9.2 kHz.