We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar.
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机译：我们介绍了新型压电驱动的全聚合物三腔蠕动微泵的设计，制造和表征。优化的双压电晶片弯曲致动器已被设计为以最佳和最有效的方式使聚合物膜变形。微型泵的压电致动器由±260 V的致动电压驱动。该泵的总尺寸为46×18×4 mm，通过热压花制成，并且组装非常简单。提出的设计能够以4.8 ml / min的流量泵送水，并实现最大的app反压。 200毫巴
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