Analysis of application patterns of Z-type MEMS microspring

摘要

In this paper, we design a Z-type microspring, which consists of several "Z" type micromechanical beams within mutual connection. With good mechanical performance and mature LIGA fabrication technology, Ni is chosen as the material of Z-type MEMS microspring. The mechanical properties of electroformed Ni have been tested by the Micro Hardness Tester, and the Young's modulus is 219 GPa. Different from traditional springs, microsprings can be divided into three application patterns in direction x, y, and z to study. Applying the Castigliano second theorem of energy method in macro theory, the formulas used to calculate the spring constant of Z-type microspring in the directions of the three application patterns were derived, and verified by the ANSYS finite element method. Using the Tytron250 micro force test machine, the experiments of the Z-type microspring deformation properties were carried out. The spring constant, rupture force and rupture strength of Z-type microspring in direction y are 3821 N/m, 1.64 N and 1.61 GPa, respectively. The experimental results agree with the theoretical analysis. Based on the analysis above, the change laws of the spring constant of microspring in the three application patterns are summarized.