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首页> 外文期刊>Materials science in semiconductor processing >The significant effect of film thickness on the properties of chalcopyrite thin absorbing films deposited by RF magnetron sputtering
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The significant effect of film thickness on the properties of chalcopyrite thin absorbing films deposited by RF magnetron sputtering

机译:膜厚对射频磁控溅射沉积黄铜矿薄膜的影响

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摘要

In this paper, thickness dependent structural, surface morphological, optical and electrical properties of RF magnetron sputtered CuIn0.8Ga0.2Se2 (CIGS) thin films were studied using X-ray diffraction (XRD), Transmission electron microscopy (TEM), Field emission scanning electron microscopy (FE-SEM), Atomic force microscopy (AFM), UV-vis-NIR spectrophotometer and Keithley electrical measurement unit. The peak intensity along (112) plane as well as crystallite size was found to increase with thickness. However, for higher film thickness >116 pm, crystallinity reduced due to higher % of Cu content. TEM analysis confirmed pollycrysallinity as well as chalcopyrite phase of deposited films. The band gap was found to decrease with increase in thickness yielding a minimum value of 1.12 eV for film thickness 1.70 mu m. The I-V characteristics showed the ohmic behavior of metal semiconductor contact with higher conductivity for film thickness 1.16 tim. (C) 2015 Elsevier Ltd. All rights reserved.
机译:本文利用X射线衍射(XRD),透射电子显微镜(TEM),场发射扫描技术研究了射频磁控溅射CuIn0.8Ga0.2Se2(CIGS)薄膜的厚度依赖性结构,表面形态,光学和电学性质电子显微镜(FE-SEM),原子力显微镜(AFM),紫外可见近红外分光光度计和吉时利电气测量单元。发现沿(112)平面的峰强度以及微晶尺寸随厚度增加。但是,对于> 116 pm的更高膜厚,由于较高的Cu含量%,结晶度降低。 TEM分析证实了沉积膜的花粉相和黄铜矿相。发现带隙随着厚度的增加而减小,从而对于膜厚度为1.70μm产生最小值1.12eV。 I-V特性表明,对于膜厚1.16 tim,具有较高电导率的金属半导体接触的欧姆行为。 (C)2015 Elsevier Ltd.保留所有权利。

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