Thin-Film Piezoelectric Actuators of Nonuniform Thickness and Nonhomogeneous Material Properties for Modulating Actuation Stress

摘要

The effects of the thickness variation and the material property variation of thin-film piezoelectric actuators on the actuation shear stress when the actuators are attached to an elastic plate are studied. A system of 2D equations for the flexure and shear of an elastic plate with symmetric piezoelectric actuators on the plate surfaces is derived. The equations are reduced to the case of elementary flexure without shear as a special case. The effects of the actuator thickness variation and material property variation on the actuation stress are examined using the equations obtained. It is shown that the distribution of the actuation stress depends on the thickness and material property variations of the actuators, and that actuators with varying thickness or varying material properties can be used to make modal actuators for producing a particular deformation or exciting a particular vibration mode.