Optimal PID control of a nano-Newton CMOS-MEMS capacitive force sensor for biomedical applications

摘要

This paper presents closed loop simulation of a CMOS-MEMS force sensor for biomedical applications employing an optimal proportional-integral-derivative controller. Since the dynamic behavior of the sensor under investigation is nonlinear the iterative feedback tuning approach was proposed for optimal gains tuning of the proposed controller. Simulation results presented in this research illustrate that the proposed controller suppresses the undesired in-plane vibration induced by environment or gripper 40 times faster than the nonlinear controller proposed in the literature. To suppress the maximum input disturbance the maximum voltage was approximately 18 V which was less than the pull-in voltage of 30 V. The proposed controller is served to actuate two stator fingers adjacent to a rotor finger in order to provide both the attractive and repellent forces during manipulation. Employing the proposed mechanism not only resolves the drawbacks corresponding to the nonlinear controller presented in the literature but also improves its performance of the closed loop system by using the complete nonlinear dynamics of the force sensor. Also, applying complete non-linear dynamic of model improves the performance of controller and is one of superior features of proposed PID controller in comparison with the classical controller presented in literature.