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Advanced morphological analysis of patterns of thin anodic porous alumina

机译:阳极多孔氧化铝薄层图案的高级形态分析

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Different conditions of fabrication of thin anodic porous alumina on glass substrates have been explored, obtaining two sets of samples with varying pore density and porosity, respectively. The patterns of pores have been imaged by high resolution scanning electron microscopy and analyzed by innovative methods. The regularity ratio has been extracted from radial profiles of the fast Fourier transforms of the images. Additionally, the Minkowsld measures have been calculated. It was first observed that the regularity ratio averaged across all direction's is properly corrected by the coefficient previously determined in the literature. Furthermore, the angularly averaged regularity ratio for the thin porous alumina made during short single-step anodizations is lower than that of hexagonal patterns of pores as for thick porous alumina from aluminum electropolishing and two-step anodization. Therefore, the regularity ratio represents a reliable measure of pattern order. At the same time, the lower angular spread of the regularity ratio shows that disordered porous alumina is more isotropic. Within each set, when changing either pore density or porosity, both regularity and isotropy remain rather constant, showing consistent fabrication quality of the experimental patterns. Minor deviations are tentatively discussed with the aid of the Minkowsld measures, and the slight decrease in both regularity and isotropy for the final data-points of the porosity set is ascribed to excess pore opening and consequent pore merging. (C) 2014 Elsevier Inc. All rights reserved.
机译:研究了在玻璃基板上制备阳极多孔氧化铝的不同条件,分别获得了两组具有不同孔隙密度和孔隙率的样品。孔的图案已通过高分辨率扫描电子显微镜成像,并通过创新方法进行了分析。从图像的快速傅里叶变换的径向轮廓中提取了规则性比率。此外,还计算了Minkowsld度量。首先观察到,通过先前在文献中确定的系数可以正确地校正在所有方向上平均的规则比。此外,在短的单步阳极氧化过程中制得的薄多孔氧化铝的角平均规则性比铝电解抛光和两步阳极氧化制得的厚多孔氧化铝的孔隙的六边形小。因此,规则比表示图案顺序的可靠度量。同时,规则性比的较低的角展度表明无序的多孔氧化铝更各向同性。在每组中,当改变孔密度或孔隙率时,规则性和各向同性都保持相当恒定,显示出实验图案的一致制造质量。借助Minkowsld措施初步讨论了较小的偏差,而孔隙度最终数据点的规则性和各向同性均略有下降,这归因于过多的开孔和随后的孔合并。 (C)2014 Elsevier Inc.保留所有权利。

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