EFFECT OF FOCUSED ION BEAM PATTERNING ON ENLARGING ANODIZATION WINDOW AND INTERPORE DISTANCE FOR ORDERED POROUS ANODIC ALUMINA

摘要

Highly ordered porous anodic alumina with alternating-sized pores and in hexagonal and square arrangements has been produced with focused ion beam patterning guided anodization. Deeper focused ion beam patterned concaves induce better developed pores during the anodization. Focused ion beam patterning also effectively enlarges the anodization window; ordered alternating-sized nanopore arrangement and square arrangement with 150 nm interpore distance can be produced at 40-80 V potentials. Under the guidance of FIB patterned concaves in Moire patterns, different alumina nanopore arrays in Moire patterns can be obtained after the anodization.